Evolution of the Growth of a Micro-Nano Crystalline Diamond Film on an Axial Carbide Tool Model in Microwave Plasma

Conformal multilayer micro-nanocrystalline diamond coatings were grown on substrates of a hard alloy with 9% Co high aspect number in microwave plasma from gas mixtures CH4/H2 and CH4/H2/N2. The cylindrical axial tool model size ratio: d = 12 mm to l 75 mm. An original holder made molybdenum, the form sector excessive ring axis hole parallel central conductive platform, protects part substrate heating due edge effect plasma. uniformity growth part, which is located inside ring, calculated using mathematical modeling provided by rotation at speed least rpm, ensures coating. average grain nanocrystalline film measured along cylinder forming was 41 nm.